Chemical mechanical planarization for Ta-based superconducting quantum devices

Ekta Bhatia, Soumen Kar, Jakub Nalaskowski, Tuan Vo, Stephen C. Olson, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells

Type: Article

Publication Date: 2023-04-07

Citations: 3

DOI: https://doi.org/10.1116/6.0002586

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Locations

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena - View
arXiv (Cornell University) - View - PDF

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