Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits
Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits
Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly …