Engineering high-Q superconducting tantalum microwave coplanar waveguide
resonators for compact coherent quantum circuits
Engineering high-Q superconducting tantalum microwave coplanar waveguide
resonators for compact coherent quantum circuits
Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility with complementary metal-oxide-semiconductor (CMOS) technology, which is essential for quantum computing applications. Here, we demonstrate the fabrication engineering of …