Spatial metrology of dopants in silicon with exact lattice site precision

Muhammad Usman, Juanita Bocquel, Joe Salfi, B. Voisin, Archana Tankasala, Rajib Rahman, M. Y. Simmons, Sven Rogge, Lloyd C. L. Hollenberg

Type: Article

Publication Date: 2016-06-04

Citations: 51

DOI: https://doi.org/10.1038/nnano.2016.83

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