Type: Article
Publication Date: 2010-10-26
Citations: 195
DOI: https://doi.org/10.1088/1367-2630/12/10/103038
The epitaxial growth of thin films of the topological insulator Bi2Se3 on nominally flat and vicinal Si(111) substrates was studied. In order to achieve a planar growth front and better quality epifilms, a two-step growth method was adopted for the van der Waals epitaxy of Bi2Se3 to proceed. By using vicinal Si(111) substrate surfaces, the in-plane growth rate anisotropy of Bi2Se3 was exploited in order to achieve single crystalline Bi2Se3 epifilms, in which threading defects and twins are effectively suppressed. The optimization of the growth parameters has resulted in the vicinal Bi2Se3 films showing a carrier mobility of ∼2000 cm2 V−1 s−1 and a background doping of ∼3×1018 cm−3 of the as-grown layers. Such samples not only show a relatively high magnetoresistance but also show a linear dependence on the magnetic field.