High-performance thin-film lithium niobate Mach-Zehnder modulator on
thick silica buffering layer
High-performance thin-film lithium niobate Mach-Zehnder modulator on
thick silica buffering layer
High-speed photonic integrated circuits leveraging the thin-film lithium niobate (TFLN) platform present a promising approach to address the burgeoning global data traffic demands. As a pivotal component, TFLN-based electro-optic (EO) Mach-Zehnder modulators (MZMs) should exhibit low driving voltage, broad operation bandwidth, high extinction ration, and low insertion loss. However, the …