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Low-Loss Higher-Order Cross-Sectional Lam\'e Mode SAW Devices in 10-20 GHz Range

Low-Loss Higher-Order Cross-Sectional Lam\'e Mode SAW Devices in 10-20 GHz Range

This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 50 nm aluminum patterns on 600 nm X-Cut LN on amorphous silicon on silicon carbide, where longitudinally dominant SAW was targeted. Upon fabrication, higher-order thickness-based …