Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications
Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high- Q superconducting microwave resonator …