Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization
Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization
Abstract In assessing piezoresistive microcantilever sensitivity for surface stress sensing, the key is its capacity to translate surface stress into changes in resistance. This change hinges on the interplay between stresses and piezoresistivity. Traditional optimization has been constrained by rudimentary 1D models, overlooking potentially superior designs. Addressing this, we employed …