Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity
Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 - 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. …