Design and test results of different aluminum coating layers on the sCMOS sensors for soft X-ray detection
Design and test results of different aluminum coating layers on the sCMOS sensors for soft X-ray detection
Abstract In recent years, tremendous progress has been made on complementary metal-oxide-semiconductor (CMOS) sensors for applications as X-ray detectors. To shield the visible light in X-ray detection, a blocking filter of aluminum is commonly employed. We designed three types of aluminum coating layers, which are deposited directly on the surface …