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Integrated optical-readout of a high-Q mechanical out-of-plane mode

Integrated optical-readout of a high-Q mechanical out-of-plane mode

Abstract The rapid development of high- Q M macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high- Q M structures on a chip, while simultaneously achieving large coupling …