Mechanical dissipation by substrate–mode coupling in SiN resonators
Mechanical dissipation by substrate–mode coupling in SiN resonators
State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors, and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators, and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance …