Accelerated Lifetime Testing and Analysis of Delta-Doped Silicon Test Structures
Accelerated Lifetime Testing and Analysis of Delta-Doped Silicon Test Structures
As transistor features shrink beyond the 2 nm node, studying and designing for atomic scale effects become essential. Being able to combine conventional CMOS with new atomic scale fabrication routes capable of creating 2D patterns of highly doped phosphorus layers with atomic precision has implications for the future of digital …