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Wafer‐Scale Electroactive Nanoporous Silicon: Large and Fully Reversible Electrochemo‐Mechanical Actuation in Aqueous Electrolytes
Nanoporosity in silicon results in interface-dominated mechanics, fluidics, and photonics that are often superior to the ones of the bulk material. However, their active control, for example, by electronic stimuli, is challenging due to the absence of intrinsic piezoelectricity in the base material. Here, for large-scale nanoporous silicon cantilevers wetted …