Spalling‐Induced Liftoff and Transfer of Electronic Films Using a van der Waals Release Layer
Spalling‐Induced Liftoff and Transfer of Electronic Films Using a van der Waals Release Layer
Abstract Heterogeneous integration strategies are increasingly being employed to achieve more compact and capable electronics systems for multiple applications including space, electric vehicles, and wearable and medical devices. To enable new integration strategies, the growth and transfer of thin electronic films and devices, including III‐nitrides, metal oxides, and 2D materials, …