Coupling of Erbium-Implanted Silicon to a Superconducting Resonator
Coupling of Erbium-Implanted Silicon to a Superconducting Resonator
Erbium-implanted silicon is promising for both photonic and quantum-technology platforms, since it possesses both telecommunications and integrated-circuit processing compatibility. However, several different $\mathrm{Er}$ centers are generated during the implantation and annealing process, the presence of which could hinder the development of these applications. When $\mathrm{Si}$ is coimplanted with ${10}^{17}\phantom{\rule{0.1em}{0ex}}{\mathrm{cm}}^{\ensuremath{-}3}$ $\mathrm{Er}$ …