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Modeling and Observation of Nonlinear Damping in Dissipation-Diluted Nanomechanical Resonators

Modeling and Observation of Nonlinear Damping in Dissipation-Diluted Nanomechanical Resonators

Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von K\'arm\'an theory, which can be numerically evaluated using finite-element …