Monolithic integration of InP on Si by molten alloy driven selective area epitaxial growth
Monolithic integration of InP on Si by molten alloy driven selective area epitaxial growth
We report a new approach for monolithic integration of III-V materials into silicon, based on selective area growth and driven by a molten alloy in metal-organic vapor epitaxy. Our method includes elements of both selective area and droplet-mediated growths and combines the advantages of the two techniques. Using this approach, …