High reflectivity high-Q micromechanical Bragg mirror
High reflectivity high-Q micromechanical Bragg mirror
We report on the fabrication and characterization of a micromechanical oscillator consisting only of a free-standing dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of …