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Superconducting coplanar waveguide resonators for low temperature pulsed electron spin resonance spectroscopy

Superconducting coplanar waveguide resonators for low temperature pulsed electron spin resonance spectroscopy

We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators under equivalent conditions. The high achievable filling factor even for small sized samples and the relatively …