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The formation of Er-oxide nanoclusters in SiO2 thin films with excess Si

The formation of Er-oxide nanoclusters in SiO2 thin films with excess Si

The nucleation, distribution, and composition of erbium embedded in a SiO2–Si layer were studied with high resolution transmission electron microscopy (TEM), electron energy loss spectroscopy, energy filtered TEM, scanning transmission electron microscopy, and x-ray photoelectron spectroscopy. When SiO2 layer contains small amounts of Si and Er, nanoclusters of Er oxide …