Aluminum oxide layers as possible components for layered tunnel barriers
Aluminum oxide layers as possible components for layered tunnel barriers
We have studied transport properties of Nb/Al/AlOx/Nb tunnel junctions with ultrathin aluminum oxide layers formed by (i) thermal oxidation and (ii) plasma oxidation, before and after rapid thermal postannealing of the completed structures at temperatures up to 550 °C. Postannealing at temperatures above 300 °C results in a significant decrease …