Parametric excitation of a SiN membrane via piezoelectricity
Parametric excitation of a SiN membrane via piezoelectricity
We develop a stoichiometric silicon nitride (SiN) membrane-based electromechanical system, in which the spring constant of the mechanical resonator can be dynamically controlled via piezoelectric actuation. The degenerate parametric amplifier is studied in this configuration. We observe the splitting of mechanical mode in the response spectra of a phase-sensitive parametric …