Damping of metallized bilayer nanomechanical resonators at room temperature
Damping of metallized bilayer nanomechanical resonators at room temperature
We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality factor and damping for both in- and out-of-plane flexural modes of the bilayer system are presented, which allows for …