Characterization of amorphous and crystalline silicon nanoclusters in ultra thin silica layers
Characterization of amorphous and crystalline silicon nanoclusters in ultra thin silica layers
The nucleation and structure of silicon nanocrystals formed by different preparation conditions and silicon concentrations (28–70 area %) have been studied using transmission electron microscopy (TEM), energy filtered TEM, and secondary ion mass spectroscopy. The nanocrystals were formed after heat treatment at high temperature of a sputtered 10 nm thick …