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Composition and structure of Pd nanoclusters in SiO<i>x</i> thin film

Composition and structure of Pd nanoclusters in SiO<i>x</i> thin film

The nucleation, distribution, composition and structure of Pd nanocrystals in SiO$_2$ multilayers containing Ge, Si, and Pd are studied using High Resolution Transmission Electron Microscopy (HRTEM) and X-ray Photoelectron Spectroscopy (XPS), before and after heat treatment. The Pd nanocrystals in the as deposited sample seem to be capped by a …