Modeling and characterization of a cantilever-based near-field scanning microwave impedance microscope
Modeling and characterization of a cantilever-based near-field scanning microwave impedance microscope
This paper presents a detailed modeling and characterization of a microfabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis, we model the tip-sample interaction as small impedance changes between the tip electrode and the ground at our working frequencies near 1 GHz. The equivalent lumped …