Advanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits
Advanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits
We review the salient features of two advanced nodes of an 8-Nb-layer fully planarized process developed recently at MIT Lincoln Laboratory for fabricating Single Flux Quantum(SFQ) digital circuits with very large scale integration on 200-mm wafers: the SFQ4ee and SFQ5ee nodes, where 'ee' denotes the process is tuned for energy …