High-quality MgB2 thin films in situ grown by dc magnetron sputtering
High-quality MgB2 thin films in situ grown by dc magnetron sputtering
Thin films of the recently discovered magnesium diboride (MgB2) intermetallic superconducting compound have been grown using a magnetron sputtering deposition technique followed by in situ annealing at 830 °C. High-quality films were obtained on both sapphire and MgO substrates. The best films showed a maximum Tc of 35 K (onset), …