Edge mode engineering for optimal ultracoherent silicon nitride membranes
Edge mode engineering for optimal ultracoherent silicon nitride membranes
Due to their high force sensitivity, mechanical resonators combining low mechanical dissipation with a small motional mass are highly demanded in fields as diverse as resonant force imaging, mass sensing, or cavity optomechanics. "Soft-clamping" is a phononic engineering technique by which mechanical modes of highly-stressed membranes or strings are localized …