Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy
Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy
Over the past two decades, prototype devices for future classical and quantum computing technologies have been fabricated by using scanning tunneling microscopy and hydrogen resist lithography to position phosphorus atoms in silicon with atomic-scale precision. Despite these successes, phosphine remains the only donor precursor molecule to have been demonstrated as …