High frequency guided mode resonances in mass-loaded, thin film gallium nitride surface acoustic wave devices
High frequency guided mode resonances in mass-loaded, thin film gallium nitride surface acoustic wave devices
We demonstrate high-frequency (>3 GHz), high quality factor radio frequency (RF) resonators in unreleased thin film gallium nitride (GaN) on sapphire and silicon carbide substrates by exploiting acoustic guided mode (Lamb wave) resonances. The associated energy trapping, due to mass loading from gold electrodes, allows us to efficiently excite these …