Giant Conductivity Modulation of Aluminum Oxide Using Focused Ion Beam
Giant Conductivity Modulation of Aluminum Oxide Using Focused Ion Beam
Precise control of the conductivity of semiconductors through doping has enabled the creation of advanced electronic devices; similarly, the ability to control the conductivity in oxides can enable novel advanced electronic and optoelectronic functionalities. While this was successfully shown for moderately insulating oxides, such as In2O3, a reliable method for …