Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond
Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond
Sculpturing desired shapes in single crystal diamond is ever more crucial in the realization of complex devices for nanophotonics, quantum computing, and quantum optics. The crystallographic orientation dependent wet etch of single crystalline silicon in potassium hydroxide (KOH) allows a range of shapes formed and has significant impacts on MEMS …