Quadratic electromechanical strain in silicon investigated by scanning probe microscopy
Quadratic electromechanical strain in silicon investigated by scanning probe microscopy
Piezoresponse force microscopy (PFM) is a powerful tool widely used to characterize piezoelectricity and ferroelectricity at the nanoscale. However, it is necessary to distinguish microscopic mechanisms between piezoelectricity and non-piezoelectric contributions measured by PFM. In this work, we systematically investigate the first and second harmonic apparent piezoresponses of a silicon …