Control of recoil losses in nanomechanical SiN membrane resonators
Control of recoil losses in nanomechanical SiN membrane resonators
In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$, reach the limit set by …