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Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas
Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving …