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Frequency and phase noise of ultrahigh<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>Q</mml:mi></mml:math>silicon nitride nanomechanical resonators
We describe the measurement and modeling of amplitude noise and phase noise in ultrahigh $Q$ nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators' noise performance is studied with high precision. We find that the amplitude noise can be well described by the thermomechanical …