Prefer a chat interface with context about you and your work?
Thermal conductivity of silicon nitride membranes is not sensitive to stress
We have measured the thermal properties of suspended membranes from 10 K to 300 K for two amplitudes of internal stress (about 0.1 GPa and 1 GPa) and for two different thicknesses (50 nm and 100 nm). The use of the original 3 \omega -Volklein method has allowed the extraction …