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Control of Material Damping in High-<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>Q</mml:mi></mml:math>Membrane Microresonators
We study the mechanical quality factors of bilayer aluminum--silicon-nitride membranes. By coating ultrahigh-$Q$ ${\mathrm{Si}}_{3}{\mathrm{N}}_{4}$ membranes with a more lossy metal, we can precisely measure the effect of material loss on $Q$'s of tensioned resonator modes over a large range of frequencies. We develop a theoretical model that interprets our results …