Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
State of the art nanomechanical resonators present quality factors $Q\ensuremath{\sim}{10}^{3}--{10}^{5}$, which are much lower than those that can be naively extrapolated from the behavior of micromechanical resonators. We analyze the dissipation mechanism that arises in nanomechanical beam structures due to the tunneling of mesoscopic phonons between the beam and its …