Patterning of ultrathin YBCO nanowires using a new focused-ion-beam process
Patterning of ultrathin YBCO nanowires using a new focused-ion-beam process
Manufacturing superconducting circuits out of ultrathin films is a challenging task when it comes to patterning complex compounds, which are likely to be deteriorated by the patterning process. With the purpose of developing high-T$_c$ superconducting photon detectors, we designed a novel route to pattern ultrathin YBCO films down to the …