Fabrication and Characterization of Superconducting Circuit QED Devices for Quantum Computation
Fabrication and Characterization of Superconducting Circuit QED Devices for Quantum Computation
We present fabrication and characterization procedures of devices for circuit quantum electrodynamics (cQED). We have made 3-GHz cavities with quality factors in the range 10/sup 4/-10/sup 6/, which allow access to the strong coupling regime of cQED. The cavities are transmission line resonators made by photolithography. They are coupled to …