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Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures

Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures

The combination of large thickness ($>3$ $μ$m), large--area uniformity (75 mm diameter), high growth rate (up to 0.4 $μ$m/min) in assemblies of complex--shaped nanowires on lithographically defined patterns has been achieved for the first time. The nanoscale and the microscale have thus been blended together in sculptured thin films with …