High quality factor photonic crystal nanobeam cavities
High quality factor photonic crystal nanobeam cavities
We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-dimensional photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical quality factors as high as 1.4×107. By detecting the cross-polarized resonantly scattered …