Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy
Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy
In this paper we demonstrate atomic-scale lithography on hydrogen terminated Ge(001). The lithographic patterns were obtained by selectively desorbing hydrogen atoms from a H resist layer adsorbed on a clean, atomically flat Ge(001) surface with a scanning tunneling microscope tip operating in ultra-high vacuum. The influence of the tip-to-sample bias …