Low Resistance Metal Contacts to MoS<sub>2</sub>Devices with Nickel-Etched-Graphene Electrodes
Low Resistance Metal Contacts to MoS<sub>2</sub>Devices with Nickel-Etched-Graphene Electrodes
We report an approach to achieve low-resistance contacts to MoS2 transistors with the intrinsic performance of the MoS2 channel preserved. Through a dry transfer technique and a metal-catalyzed graphene treatment process, nickel-etched-graphene electrodes were fabricated on MoS2 that yield contact resistance as low as 200 ohm-um. The substantial contact enhancement …