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Accurate Measurement of Electron Beam Induced Displacement Cross Sections for Single-Layer Graphene

Accurate Measurement of Electron Beam Induced Displacement Cross Sections for Single-Layer Graphene

We present an accurate measurement and a quantitative analysis of electron-beam induced displacements of carbon atoms in single-layer graphene. We directly measure the atomic displacement ("knock-on") cross section by counting the lost atoms as a function of the electron beam energy and applied dose. Further, we separate knock-on damage (originating …