Cavity Optomechanics with Stoichiometric SiN Films
Cavity Optomechanics with Stoichiometric SiN Films
We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor ${Q}_{m}$ and frequency ${\ensuremath{\nu}}_{m}$ reaching …